IRRADIATED ATOM QUANTITY MEASURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To obtain a stable lighting state and highly accurate brightness modulation and to accurately measure the quantity of irradiated atoms by generating brightness modulation for lock-in detection in a hollow cathode lamp in the irradiated atom quantity measuring apparatus in a vacuum deposition apparatus. SOLUTION: A constant current circuit having the resistor connected across a transistor and an emitter electrode or the resistor connected across a field effect transistor and a source electrode or a constant current diode as a principal component is used to allow two current values to alternately flow to a hollow cathode lamp L to generate spectrum light stably modulated in brightness, and the absorbing quantity due to irradiated atoms of the spectrum beam is measured by an atomic absorption spectroscopic method using a lock-in amplifier 107.