APPARATUS FOR ARRANGING LASER HEAD IN STEPPER FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: An apparatus for arranging a laser head in a stepper for manufacturing a semiconductor device is provided to finely adjust the left and right widths and the heights of a changed laser head, thereby reducing an arrangement error of the laser head. CONSTITUTION: In an apparatus for arranging a laser head(10) in stepper, a laser beam from the laser head mounted in a laser head fixing plate(100) is focused on a reflector via a plurality of prisms(13) and interferometers(14). The laser beam focused on the reflector is reflected and is re-reflected on the interferometer to be re-focused on the reflector. An arrangement of the laser head is proceeded through the focused laser beams. The apparatus for arranging a laser head arranges the left and right widths and heights of the laser head by moving bolt fixing parts(11) of the laser head in X-axis and Y-axis directions on the laser head fixing plate.