发明名称 METHOD FOR MANUFACTURING WAFER LEVEL FLIP CHIP PACKAGE USING ANISOTROPIC CONDUCTIVE ADHESIVE
摘要 PURPOSE: A method for manufacturing a wafer level flip chip package using anisotropic conductive adhesive is provided to realize a chip-sized package with simplified, economical and high productive process and material. CONSTITUTION: A wafer is provided with a plurality of chips(7) each covered with a passivation layer(3) and having I/O pads(2) formed thereon. In the wafer level, a plurality of low-priced non-solder bumps(4) are formed on the respective I/O pads(2), and an anisotropic conductive adhesive(6) is then coated thereon. The low-priced non-solder bumps(4) may use gold stud bumps formed by bonding wires, or nickel/gold bumps formed by electroless plating. The anisotropic conductive adhesive(6) is preferably composed of a half-cured epoxy resin, nickel or gold-coated polymer balls of 2 to 15 weight percents, a solvent, and a hardening agent. The anisotropic conductive adhesive(6) may have a form of a film or paste. After dicing the wafer into individual chips(7), each chip(7) is bonded to a substrate by flip chip bonding technique.
申请公布号 KR20010019770(A) 申请公布日期 2001.03.15
申请号 KR19990036355 申请日期 1999.08.30
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 BAEK, GYEONG UK;LIM, MYEONG JIN
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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