ARC TYPE EVAPORATION SOURCE

摘要

PURPOSE: Disclosed is an arc type evaporation source by which effective utilization ad reduction in replacement frequency of a cathode are possible and a speed for film formation can be kept constant for a long time. CONSTITUTION: The arc type evaporation source(30) is provided with a columnar cathode(32) which has a larger length in an axial direction than its diameter, a cathode feed mechanism(48) which feeds the cathode(32) forward along its axis, a cooling mechanism(36) of the cathode which cools the cathode at least on a side surface with cooling water(40), a magnetic coil(52) which generates a magnetic flux(54) almost perpendicular to a evaporation surface(33) of the cathode(32) or spreading outward on the evaporation surface(33).