发明名称 |
POSITIVE TYPE PHOTORESIST COMPOSITION |
摘要 |
PURPOSE: Provided is a positive type photoresist composition useful in formation of photoresist film for liquid crystal display circuit and/or microcircuit used in semiconductor area by comprising polymer resin and sensitive compound and reducing bad smell. CONSTITUTION: A positive type photoresist composition comprises polymer resin to form photoresist film, sensitive compound to alterate solubility of the film and solvent such as 3-methoxybutylacetate and 4-butyrolactone. The composition preferably contains novolak resin as the polymer resin, diazide compound as the sensitive compound. The 3-methoxybutylacetate and 4-butyrolactone are blended, by weight part, in a ratio of 60-80 : 2-10. The positive type photoresist composition effects industrial application because of its excellent properties such as sensing rate, residual rate, resolution and/or adhesiveness to substrate.
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申请公布号 |
KR20010019745(A) |
申请公布日期 |
2001.03.15 |
申请号 |
KR19990036321 |
申请日期 |
1999.08.30 |
申请人 |
DONGWOO FINE-CHEM CO., LTD.;SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
JU, JIN HO;KANG, SEONG CHEOL;KIM, GI SU;LEE, YU GYEONG;NA, YUN JEONG;PARK, HONG SIK |
分类号 |
C08K5/28;C08L61/10;G03F7/004;G03F7/022;G03F7/023;H01L21/027;(IPC1-7):G03F7/039 |
主分类号 |
C08K5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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