ORGANIC POLYMER FOR PROTECTING DIFFUSE REFLECTION

摘要

PURPOSE: An organic polymer for protecting diffuse reflection is provided for possessing good heat-resistance and adhesiveness as well as superior absorbency of far-infrared ray by means of ArF light source having wavelength of 193nm. CONSTITUTION: An organic polymer for preventing diffuse reflection comprises dihydrocarveol as a first monomer and another compound selected from N-benzyl maleimide or phenyl maleimide as a second monomer. The first monomer can efficiently absorb far-infrared ray having 250nm or less and have hydroxy group to increase adhesive strength to substrate and be advantageous to cross-linkage formation with epoxy group. The second monomer can serve to absorb far-infrared ray and easily react with any monomer.