,申请号JP19970031788-传众专利搜索

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发明名称
摘要
申请公布号	JP3141929(B2)	申请公布日期	2001.03.07
申请号	JP19970031788	申请日期	1997.02.17
申请人		发明人
分类号	C23C16/44;C23C16/50;H01J37/32;H01L21/205;H01L21/304;H01L21/31;(IPC1-7):C23C16/44	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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