| 摘要 |
An electron energy spectrometer having an electron energy analyzer equipped with plural detectors including a reference detector. The energy of electrons impinging on the reference detector is stepped in increments. The value of these increments can be set at will. The spectrometer has improved detection accuracy and improved detection sensitivity. The spectrometer irradiates the surface of a sample with an electron beam. The energy of the electron beam is swept. The intensities of electrons ejected from the sample surface are analyzed. This instrument utilizes the multidetector scheme. Data about the intensities of the electrons is collected. Interpolation calculations are performed at each value of the energy according to the collected data. |
