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发明名称
用于感应耦合室的减少污染衬垫
摘要
本发明提供一种透过电浆增强化学气相沉积法而沉积一薄膜之方法及设备。在一实施例中,一设备包括制程室,且制程室具有设置在室内且围绕于室壁周围的线圈。衬垫设置于线圈上方,并且受到一涂层材料保护,其中此涂层材料的薄膜特性系相似于衬垫之薄膜特性。在一实施例中,衬垫系为一含矽材料,并且受到一涂层材料保护。因此,在部分之保护性涂层材料被无意溅镀之实例中,若溅镀材料伴随基材上之沉积薄膜而沉积在基材上时,其不会成为一个污染源。
申请公布号
TW200830942
申请公布日期
2008.07.16
申请号
TW096138281
申请日期
2007.10.12
申请人
应用材料股份有限公司
发明人
崔寿永;王群华
分类号
H05H1/16(2006.01);H01L21/205(2006.01)
主分类号
H05H1/16(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
美国
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