SEMICONDUCTOR DEVICE AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To make formable a reflecting electrode which attains efficient reflection and irregular reflection of incident light in an active matrix type reflective liquid crystal display device by forming a reflecting film on an insulating film comprising an organic resin material containing fine particles or minute chips of an organic material. SOLUTION: In the semiconductor device, an organic resin film containing fine particles or minute chips 147b of an organic material is disposed as an interlayer insulating film 147a and a reflecting electrode is produced on the film 147a to obtain the objective reflecting electrode having a rugged surface. In this producing step, a protective insulating film 146 is formed from the tops of a gate electrode and a gate insulating film. After activating and hydrogenating steps, the interlayer insulating film 147a comprising an organic insulator is formed by coating. In order to provide scattering characteristics to the reflecting electrode disposed on the interlayer insulating film 147a, the film 147a is required to have a rugged shape. Minute chips 147b having a prescribed size are added to a solution containing the organic insulator so as to ensure the rugged shape.