PLASMA REACTION APPARATUS HAVING PRE-SEASONED SHOWERHEADS AND METHODS FOR MANUFACTURING THE SAME

摘要

Plasma reaction apparatus (100) having pre-seasoned showerheads (216) and methods (202) for pre-seasoning a showerhead of a plasma reaction apparatus are provided. In an embodiment, a pre-seasoned showerhead (216) for a plasma reaction apparatus (100) comprises an underside surface (250) and a continuous, substantially uniform protective layer (252) disposed overlying the underside surface.