INK-JET HEAD

摘要

PROBLEM TO BE SOLVED: To provide an ink-jet head which facilitates controlling of a shape and a thickness of liquid chambers and diaphragms, eliminates an unevenness in jet characteristic, and moreover can improve a degree of design freedom. SOLUTION: The ink-jet head includes an Si single crystal substrate 10 provided with liquid chambers 11 for holding a liquid to be jetted which have part of wall faces formed as a diaphragm 12, piezoelectric elements 20 each comprised of a lower electrode 21 formed on the diaphragm 12, a piezoelectric film 22 and an upper electrode 23, nozzles communicating with the liquid chambers 11, and fluid resistance channels. A volume of the liquid chamber 11 is changed by deflecting the diaphragm 12 by the piezoelectric element 20, whereby ink is jetted. When a length in an arrangement direction of the liquid chamber 11 is L, a length in a depthwise direction of the liquid chamber 11 is W, a thickness of the piezoelectric film 22 is Tp, and a thickness of the diaphragm 12 is Tv, a relationship of 5Tv, L/(Tp+Tv)=α(1/ L0.333), and 18<α<74 is satisfied.