| 摘要 |
PROBLEM TO BE SOLVED: To provide an arc type evaporation source by which effective utilization ad reduction in replacement frequency of a cathode are possible and a speed for film formation can be kept constant for a long time. SOLUTION: This arc type evaporation source 30 is provided with a columnar cathode 32 which has a larger length in an axial direction than its diameter, a cathode feed mechanism 48 which feeds the cathode 32 forward along its axis, a cooling mechanism 36 of the cathode which cools the cathode at least on a side surface with cooling water 40, a magnetic coil 52 which generates a magnetic flux 54 almost perpendicular to a evaporation surface 33 of the cathode 32 or spreading outward on the evaporation surface 33.
|
