发明名称 Apparatus and method for imaging a particle beam
摘要 An apparatus and method for imaging on a detector a particle beam of charged particles having a distinct energy distribution and a distinct angle distribution. The apparatus has deflectors which are provided to create in the particle beam essentially parallel particle paths spaced to correspond to their original angle distribution. The deflectors also direct the particle beam to semi-transmissive, aligned filter electrodes, which produce a potential difference to create a deceleration field to allow the particles to pass through by means of energy selectivity.
申请公布号 US6198095(B1) 申请公布日期 2001.03.06
申请号 US19980006985 申请日期 1998.01.14
申请人 STAIB INSTRUMENTS GMBH 发明人 STAIB PHILIPPE
分类号 G01N23/20;G01N23/22;H01J37/05;H01J37/244;H01J37/252;H01J37/295;H01J49/44;H01J49/48;(IPC1-7):H01J49/00 主分类号 G01N23/20
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