APPARATUS FOR AUTOMATICALLY LOCKING WAFER TRANSFER BOX

摘要

PURPOSE: An apparatus for automatically locking a wafer transfer box is provided to prevent a wafer from being contaminated or damaged, by instantly locking the wafer transfer box if impact or vibration is given to the wafer transfer box during a transfer of the box. CONSTITUTION: A wafer transfer box is composed of a body part and a lid part, and receives a carrier loaded with a plurality of wafers. An automatic lock unit is coupled to an upper surface of the lid part to automatically and instantly lock the wafer transfer box by impact or vibration during a transfer of the box.