WAFER CASSETTE HAVING RECOGNITION MARK INSIDE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A wafer cassette having a recognition mark inside is provided to maintain a recognition mark during a lifetime of the wafer cassette, by preventing the recognition mark from being damaged by a chemical solution in a cleaning process. CONSTITUTION: A wafer cassette including a wafer receiving unit, a fixing unit, a handler and a cassette housing(14), further includes a recognition mark(20) and a recognition mark cover(22). The recognition mark is installed in a constant position of the cassette housing. The recognition mark cover completely surrounds the recognition mark. A wafer is placed in a closed space between the cassette housing and the recognition mark cover.