| 摘要 |
PROBLEM TO BE SOLVED: To rapidly and accurately detect and discriminate the defect contents of the surface of an object by a single inspecting device by simultaneously applying irradiation of yellow light in plane shape from a yellow light source and linear blue light from a blue light source, picking up the image of reflected light by a color camera with an RGB output function, and analyzing the image. SOLUTION: Light from a surface yellow light source A is applied to irradiate the surface of an inspected body E, with broadening surrounded by two dotted lines a1, a2. The mutual directions of the yellow light source A and a color camera C are so set that an incidence angle (t) of yellow light a2 toward a focus position (e) of the camera C coincides with an image pickup angle (v) of the camera C. The camera C also picks up the image of irregularly reflected yellow light c2. Light from a linear blue light source B is applied to irradiate the focus position (e), and the camera C picks up the image of only blue light irregularly reflected toward the camera C in the focus position (e) and traveling as shown by c1. RGB output from the camera C and further monochromatic luminance output from a monochromatic camera D if necessary are subjected to OR processing or the like to analyze the image.
|
