| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing device capable of manufacturing a high quality organic EL display device efficiently at low cost in mass production. SOLUTION: A ratio of vapor density m at an arbitrary position apart from an opening part by a distance L at a radiation angleθfrom a central line of the opening part for vapor density m0 at a distance L0 from the opening part at the center on the opening part of each evaporation source is m/m0=(L0/ L)2.cosnθ, and an approximate n value is n=3 to 10 of an evaporation source of a host material and n=8 to 18 of an evaporation source of a guest material, a position of the evaporation source of the host material for a substrate 2 is arranged at a position 1.0 to 2.0 times a distance from the center of the substrate to an end part of the substrate, a position of the evaporation source of the guest material is arranged at a position 0.5 to 1.0 times a distance from the center of the substrate to an end part thereof, the evaporation source of the host material and the evaporation source of the guest material are used simultaneously, and at least two kinds of materials are deposited simultaneously to constitute this manufacturing device.
|
