| 摘要 |
PROBLEM TO BE SOLVED: To dry paste applied on a substrate uniformly. SOLUTION: In the configuration of a system in which a heat exchanger 10 is arranged at the middle of an exhaust pipe connected to heating chambers (1), (2), (3) and (4), exhaust 11, of which temperature is dropped by transferring exhaust heat to a supply air, is fed into the preheating chamber (1), and a supply air 14 heated by heat exchange is fed into the main heating chambers (2), (3) and (4), the temperature or the flow of the blow-in air is automatically controlled by a control board based on the detected values of these sensors 20 arranging the detecting sensor 21 of the concentration of solvent inside the preheating chamber (1) and temperature sensors 20 (20a to 20d) to all the heating chambers (1), (2), (3) and (4).
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