发明名称 GAS NOZZLE
摘要 PROBLEM TO BE SOLVED: To provide a gas nozzle capable of uniformalizing the flow rate distribution of a gas from a blowing port. SOLUTION: This nozzle is constituted so that a tubular feed port 11a for feeding the gas 1 to a header 11a of a nozzle main body 11 is provided on one end surface side of the box shaped nozzle main body 11 and a slit like blowing port 11b for blowing the gas 1 from the header 11c is formed at the other end surface side of the nozzle main body 11. In such a case, a porous body 12 composed of a sintered metal, a ceramic or the like is provided between the feed port 11a and the blowing port 11b inside the nozzle main body 11 to separate the inside of the nozzle main body 11 into the feed port 11a side and the blowing port 11b side.
申请公布号 JP2001054746(A) 申请公布日期 2001.02.27
申请号 JP19990233545 申请日期 1999.08.20
申请人 MITSUBISHI HEAVY IND LTD 发明人 YONEKURA YOSHIMICHI;KATO MITSUO;YAMADA AKIRA;KOSAKA KENICHIRO
分类号 B05B1/04;C23C16/455;H01L21/205;(IPC1-7):B05B1/04 主分类号 B05B1/04
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