| 发明名称 |
Method of forming porous film and material for porous film |
| 摘要 |
An organic acid containing solution obtained by adding an organic acid having an alkyl group to a solution including silanol condensate particles is applied on a substrate so as to form a coating film. The coating film is heat treated so as to form a porous film.
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| 申请公布号 |
US6194029(B1) |
申请公布日期 |
2001.02.27 |
| 申请号 |
US19990243491 |
申请日期 |
1999.02.03 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
AOI NOBUO |
| 分类号 |
H01L21/312;B05D1/00;B05D3/02;B05D5/00;C03C1/00;H01L21/316;(IPC1-7):B05D3/02 |
主分类号 |
H01L21/312 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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