| 摘要 |
An air curtain system for forming an air curtain dividing two processing spaces and for spraying air on to a substrate to remove any impurities remaining on the substrate includes an air supplier, a main body having an air inlet passage for receiving air from the air supplier, an air flow space defined within the main body and communicating with the inlet passage, and a slit extending from the air flow space to spray the air on the substrate, and a substantially strip-shaped rectifying lattice provided with a plurality of openings located at an equal distance from each other. The lattice is positioned within the air flow space.
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