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发明名称
(A) ;ULTRASONIC FLAW DETECTOR
摘要
申请公布号
JP3138563(B2)
申请公布日期
2001.02.26
申请号
JP19930082851
申请日期
1993.04.09
申请人
发明人
分类号
C30B25/12;H01L21/205;H01L21/31;(IPC1-7):H01L21/31
主分类号
C30B25/12
代理机构
代理人
主权项
地址
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