发明名称 ELECTRONIC ELEMENT, SURFACE ACOUSTIC WAVE ELEMENT, METHOD FOR MOUNTING THEM, MANUFACTURE OF ELECTRONIC PARTS OR SURFACE ACOUSTIC WAVE DEVICE, AND SURFACE ACOUSTIC WAVE DEVICE
摘要 PURPOSE: A device is provided to prevent the breakage, electrical disconnection, etc., of an electronic element by forming an intermediate electrode on an electrode pad and a base electrode containing such a metallic material that can deteriorate the orientational property of the intermediate electrode under the intermediate electrode. CONSTITUTION: An electrode pad(2) which is electrically connected to a comb-shaped electrode is formed on the surface of a piezoelectric substrate(1) namely, on the surface on which the comb-shaped electrode is formed. On the pad(2) an intermediate electrode(3) composed of Al is provided and a base electrode(4) composed of NiCr which is a metallic material that can deteriorate the orientational property of the electrode(3) is formed under the electrode(3). Then a bump electrode(6) composed of an Au component is provided on the intermediate electrode(3), and a package electrode(7) formed on a package container(8) is faced oppositely to the intermediate electrode(3) through the bump electrode(6) and connected to the electrode(3) by pressing the electrode(7) against the electrode(3) while an ultrasonic wave is emitted.
申请公布号 KR20010014837(A) 申请公布日期 2001.02.26
申请号 KR20000022476 申请日期 2000.04.27
申请人 MURATA MANUFACTURING CO., LTD. 发明人 TAGA SHIGETO
分类号 H01L21/60;H01L41/08;H02N2/00;H03H3/08;H03H9/05;H03H9/145 主分类号 H01L21/60
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