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发明名称
INTEGRATED BAKE AND CHILL PLATE
摘要
申请公布号
KR20010015662(A)
申请公布日期
2001.02.26
申请号
KR1020007003375
申请日期
2000.03.29
申请人
发明人
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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