| 摘要 |
<p>A gas delivery system comprises a common mounting block (22) that supports the components in a predetermined arrangement and defines passageways between components so that a gas can flow through the passageways and components along a predetermined flow path. The mounting block is formed so that at least a portion of at least one mechanical part of at least one component is provided in the block, the passageways connect the components together and the remaining portion of each component not formed in the block is removably attached to the block. The block includes valve seats for each of the shut off valves (60,70,80,130,140). The block is connected to a mass flow meter (90), a flow control valve (110) and a pressure sensor (150). The various connecting passageways (36,38) can be formed in the bottom surface of the block using plates (162). The electrical circuitry that is used to operate the components is separately provided remote from the components so that replacement of a component replaces those mechanical parts of the components not provided in the block, without requiring the replacement of the electrical components. Finally, a time sharing signal distribution circuit can be used to share electrical control and processing circuits with the components of a plurality of gas sticks of a gas box delivery system.</p> |
