| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma working device capable of efficiently dry-etching a filmlike working material. SOLUTION: This plasma working device is used for unwinding a filmlike working material S wound into a roll shape and dry-etching the same, which is divided at least into each unit of an unwinding part A, a tension control part, a meandering preventive part C, a plasma working part D, an inversing part and a winding part F and is made capable of setting in a state in which these units are selectively combined and are continuously arranged. The efficient treatment for one or both sides of the working material S in accordance with purposes is made possible. Moreover, only by producing each unit, the device for different purposes is made possible, and furthermore, users can inexpensively purchase the same. |
