发明名称 Silicon carbide integrated circuits
摘要 A depletion mode MOSFET and resistor are fabricated as a silicon carbide (SiC) integrated circuit (IC). The SiC IC includes a first SiC layer doped to a first conductivity type and a second SiC layer overlaid on the first SiC layer and doped to a second conductivity type. The second SiC layer includes at least four more heavily doped regions of the second conductivity type, with two of such regions comprising MOSFET source and drain electrodes and two other of such regions comprising resistor electrodes. The second SiC layer includes an isolation trench between the MOSFET electrodes and the resistor electrodes. At least two electrically conductive contacts are provided as MOSFET electrode contacts, each being positioned over at least a portion of a respective MOSFET electrode and two other electrically conductive contacts are provided as resistor electrode contacts, each being positioned over at least a portion of a respective resistor electrode. An oxide layer extends over the second SiC layer with at least a portion of the oxide layer positioned between the MOSFET electrode contacts. A MOSFET gate electrode is positioned over the oxide layer, and coupling means are provided for electrically coupling one of the source, drain, and gate electrodes to one of the resistor electrodes.
申请公布号 US6191458(B1) 申请公布日期 2001.02.20
申请号 US19960614920 申请日期 1996.03.11
申请人 GENERAL ELECTRIC COMPANY 发明人 BROWN DALE MARIUS;MICHON GERALD JOHN;KRISHNAMURTHY VIKRAM BIDARE;KRETCHMER JAMES WILLIAM
分类号 H01L21/76;H01L21/82;(IPC1-7):H01L29/76;H01L29/94;H01L31/062 主分类号 H01L21/76
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