发明名称 |
BEAM HOMOGENIZER AND LASER RADIATION APPARATUS AND LASER RADIATION METHOD |
摘要 |
PROBLEM TO BE SOLVED: To enable satisfactory and uniform laser annealing to the whole surface of film by forming an optical lens with a lens obtained by cutting a cylindrical lens at the basic plane. SOLUTION: An optical lens 903 for dividing a laser beam in the width direction is formed of lenses obtained by cutting each cylindrical lens of the cylindrical lens group at the basic plane. The half-cylindrical lenses are arranged in several stages in the same direction. This structure is called a half-cylindrical lens group. Since the optical lens 903 is structured as explained above, the laser beam radiated to an edge 910 of a substrate 909 through the light path indicated with a thick line passes the basic line in the optical lens 903 and almost does not receive aberration of optical lens 903. The optical lens 903 is formed of half-cylindrical lens which is obtained by cutting the flat-projected cylindrical lens at the basic plane.
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申请公布号 |
JP2001044135(A) |
申请公布日期 |
2001.02.16 |
申请号 |
JP19990199653 |
申请日期 |
1999.07.13 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
TANAKA KOICHIRO |
分类号 |
H01L21/20;H01L21/268;H01S3/00;(IPC1-7):H01L21/268 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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