| 摘要 |
PROBLEM TO BE SOLVED: To give a heat load surely and easily without exerting a bad influence on measurement and a work itself relative to the optical shape measuring work. SOLUTION: An optical shape measuring system is held vertically movably by a Z-stage from above, relative to a heat load device 5 set on an XY-stage. As the heat load device 5, the upper surface of a hermetic container 50 having a double structure is shielded by a closing window 51 made of heat-resistant glass, and a work support stand 52 is arranged vertically movably by a lifting means 53 in an inside container 72 formed by heat insulating material. A space in the inside container 72 is roughly divided vertically by a support plate 82 made of heat-resistant glass, and a ceramic heater 54 and a thermocouple 55 for detecting an atmospheric temperature are arranged in the lower side space, and a work W is placed on a support surface 82a and arranged in the upper side space. A work temperature is detected by a thermocouple 56 mounted on a dummy work Wd. After controlling the atmospheric temperature at a target temperature, the work temperature is controlled to become the target temperature.
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