| 摘要 |
PROBLEM TO BE SOLVED: To permit the continuous generation of superheated water vapor having a temperature of 100 deg.C or more by the heat exchange of one time under an atmospheric pressure by a method wherein a heat exchanger, equipped with the supplying pipe and discharging pipe of water, which are communicated with a heat exchanging flow passage, is provided. SOLUTION: A heat exchanger 2 is constituted of a pure water supplying pipe for supplying pure water into a heat exchanging flow passage and a discharging pipe for discharging vapor. A pipeline 3, connected to the supplier of pure water and provided with a flow rate regulating valve 4, is connected to the supplying pipe of the heat exchanger 2. On the other hand, the discharging pipe of the heat exchanger 2 is communicated with a using side through a pipeline 6. A temperature sensor 7 is attached to the pipeline 6 and the output of the same is inputted to a temperature controller 8. The temperature controller 8 controls the power consumption of a temperature heater 5 by the signal of the temperature sensor 7 to set the temperature of the temperature heater at a predetermined value whereby the temperature of the generated vapor is controlled.
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