| 摘要 |
PROBLEM TO BE SOLVED: To obtain a torque sensor element having both high mechanical strength and detection precision, and its manufacturing method. SOLUTION: This torque sensor element is an element in which a coating film 13 composed of magnetic material is formed on a substrate 11 composed of nonmagnetic material, and torque of a rotating body is detected by magnetostriction of the coating film 13. The coating film 13 is formed by a high speed gas flame spraying method which uses combustible gas and/or combustible liquid as fuel, burns the fuel by using oxygen, turns the fuel into flame having a combustion pressure of 0.3-0.9 MPa, and supplies spraying material powder in the flame. Permeability of the substrate 11 is at most 2. Difference of coefficient of thermal expansion between the substrate 11 and the coating film 13 is set at most 1.5×10-6/ deg.C.
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