| 摘要 |
PROBLEM TO BE SOLVED: To remove a scanty amount of ozone dissolvable substance by bringing ultra pure water into contact with an oxidation-reduction catalyst at a catalyst reacting section, filtering the resultant ultra pure water through a filter device, and dissolving ozone into ultra pure water discharged from the filter device. SOLUTION: Ultra pure water is supplied to a ultra pure water supply pipe 12 by a ultra pure water transport pump 11, and then a catalyst reacting section 13 is coupled to the pipe 12 to bring the ultra pure water into contact with an oxidation-reduction catalyst, a platinum catalyst, a palladium catalyst, etc., at the section 13. The resultant ultra pure water past the section 13 is filtered by a filter device 14. Then, a gas containing ozone generated by an ozone generator 16 is supplied to the ultra pure water discharged from the device 14 for dissolution of the ozone into the ultra pure water, whereby a scanty amount of ozone dissolvable substance contained in the ultra pure water can be removed.
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