| 摘要 |
PROBLEM TO BE SOLVED: To provide a layer structure in which an epitaxial material, substantially free of cracks is grown on a substrate having a non-matching lattice constant and a relatively simple manufacturing method for realizing the structure. SOLUTION: A manufacturing method for reducing cracks 17 in an epitaxially grown layer 55 includes a step of growing a first epitaxial layer 52, composed of a first material so as to have a principal surface 63, a step of forming faces 56a and 56b which are nearly perpendicular to the principal surface 63 in the epitaxial layer 52, and a step of forming a mask 54 on the principal surface 63 of the layer 52, in a state where the faces 56a and 56b are not masked. The manufacturing method also includes a step of growing a second epitaxial layer 55 composed of a material, which is different from that of the first epitaxial layer 52 in the horizontal direction. |
