摘要 |
A high pulse rate pulse power source (20) for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source (20) includes a pulse generating circuit (50) including a charging capacitor (42), a solid state switch (44-46) and a current limiting inductor (48). Pulses generated in the pulse generating circuit (50) are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor (42) in less than 400 microseconds and a pulse control system including a programmed processor (102) controls the charging of the charging capacitor (42) an accuracy of less than about one percent at a rate of at least 4000 charges per second. In a preferred embodiment capable of operating at pulse rates of 2000 to 4000 Hz or greater, water cooling of the saturable inductors (48, 54, 64) is provided.
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申请人 |
CYMER, INC.;PARTLO, WILLIAM, N.;NESS, RICHARD, M.;ROTHWEIL, DANIEL, A.;MELCHER, PAUL, C.;SMITH, BRETT, D. |
发明人 |
BIRX, DANIEL, L. DI;PARTLO, WILLIAM, N.;NESS, RICHARD, M.;ROTHWEIL, DANIEL, A.;MELCHER, PAUL, C.;SMITH, BRETT, D. |