发明名称 HIGH PULSE RATE PULSE POWER SYSTEM WITH LIQUID COOLING
摘要 A high pulse rate pulse power source (20) for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source (20) includes a pulse generating circuit (50) including a charging capacitor (42), a solid state switch (44-46) and a current limiting inductor (48). Pulses generated in the pulse generating circuit (50) are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor (42) in less than 400 microseconds and a pulse control system including a programmed processor (102) controls the charging of the charging capacitor (42) an accuracy of less than about one percent at a rate of at least 4000 charges per second. In a preferred embodiment capable of operating at pulse rates of 2000 to 4000 Hz or greater, water cooling of the saturable inductors (48, 54, 64) is provided.
申请公布号 WO0111732(A1) 申请公布日期 2001.02.15
申请号 WO2000US20195 申请日期 2000.07.25
申请人 CYMER, INC.;PARTLO, WILLIAM, N.;NESS, RICHARD, M.;ROTHWEIL, DANIEL, A.;MELCHER, PAUL, C.;SMITH, BRETT, D. 发明人 BIRX, DANIEL, L. DI;PARTLO, WILLIAM, N.;NESS, RICHARD, M.;ROTHWEIL, DANIEL, A.;MELCHER, PAUL, C.;SMITH, BRETT, D.
分类号 H01S3/104;G03F7/20;H01S3/097;H01S3/225;H02M3/00;H02M9/06;H03K3/57;H03K17/80;(IPC1-7):H01S3/00 主分类号 H01S3/104
代理机构 代理人
主权项
地址