METHOD FOR PRODUCING AN INSULATION

摘要

The invention relates to a method for simultaneously producing storage capacitors and at least one insulation, whereby the structures obtained by means of the identical process steps serve different functions in various regions of the substrate. A multitude of storage capacitors are produced in this manner within a first region, whereas the essentially identical structure is used as an insulation in a second region. By virtue of the fact that the storage capacitors require, as a rule, very deep trenches (> 2 mu m), a very good insulation can be produced without entailing additional processes.