PIEZOELECTRIC/ELECTROSTRICTIVE MICRO ACTUATOR MADE OF MIXTURE OF CERAMIC POWDER AND POLYVINYLIDENE FLUORIDE AND METHOD FOR PRODUCING THE SAME

摘要

PURPOSE: A piezoelectric/electrostrictive micro actuator made of mixture ceramic powder and polyvinylidene fluoride is provided to increase connectivity and mechanical strength of the micro actuator. CONSTITUTION: A metal diaphragm is prepared. Ceramic oxide powder whose basic elements include lead and titanium has the size of below 5micrometer and is produced at 100-500deg.C for nonexplosive redox reactions. The ceramic oxide powder and polyvinylidene fluoride are mixed. On the metal diaphragm is formed a piezoelectric/electrostrictive membrane by using the mixture. The piezoelectric/electrostrictive membrane is heated at 100-300deg.C. and an electrode is formed on the membrane. Additionally, more ceramic devices can be applied by changing the ratio of the ceramic oxide powder and polyvinylidene fluoride.