| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink jet printing head not generating the irregularity of ink emitting capacity at each emitting nozzle caused by the height non- uniformity of ink flow channels generated by the bulding-up of the edge part of a partition wall or the hanging-down of a top plate. SOLUTION: Metal supports 20 having a height of 10μm being the usual interval between a top plate 32 and a chip substrate 20 are formed on the chip substrate 20 having heating parts 23 and electrodes formed thereon by electroplating. Next, partition walls 29 (29-2, 29-3) are baked to be formed patternwise so as to become higher than the metal supports 34 by severalμm. Succeedingly, the upper surfaces of the partition walls 29 are polished and shaved by a polishing method such as CMP to make the height of the partition walls 29 same as that of the metal supports 34. Thereafter, a common ink supply groove and ink receiving/supplying holes are formed and the top plate 32 is laminated to the partition walls and ink emitting nozzles 35 are formed to the top plate 32.
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