发明名称 |
SUBSTRATE PROCESSING APPARATUS AND FILM DEPOSITION APPARATUS |
摘要 |
A substrate processing apparatus includes a process chamber; a turntable rotatably provided in the process chamber for mounting a substrate on one surface of the turntable and including a substrate mounting portion at which the substrate is to be mounted and a table body which is an other portion of the turntable, the substrate mounting portion being configured to have a heat capacity smaller than that the table body; and a heater that heats the substrate from an opposite surface side of the turntable.
|
申请公布号 |
US2013047924(A1) |
申请公布日期 |
2013.02.28 |
申请号 |
US201213590524 |
申请日期 |
2012.08.21 |
申请人 |
ENOMOTO TADASHI;OHIZUMI YUKIO;HONMA MANABU;TOKYO ELECTRON LIMITED |
发明人 |
ENOMOTO TADASHI;OHIZUMI YUKIO;HONMA MANABU |
分类号 |
C23C16/46 |
主分类号 |
C23C16/46 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|