发明名称 |
Miniature micromachined quadrupole mass spectrometer array and method of making the same |
摘要 |
The present invention provides a quadrupole mass spectrometer and an ion filter for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and aligrnent for use in a final quadrupole mass spectrometer device.
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申请公布号 |
US6188067(B1) |
申请公布日期 |
2001.02.13 |
申请号 |
US19990436052 |
申请日期 |
1999.11.08 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
CHUTJIAN ARA;HECHT MICHAEL;ORIENT OTTO;WIBERG DEAN;BRENNEN REID A. |
分类号 |
H01J49/42;(IPC1-7):H01J49/42 |
主分类号 |
H01J49/42 |
代理机构 |
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主权项 |
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地址 |
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