| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction plate and a vacuum suction device for making the flatness of the suction surface of a suction plate have a proper value, even the suction plate is fitted to the vacuum suction device main body. SOLUTION: This suction device is a suction plate 17 mounted on the suction port side of a grinding head main body and sucking and holding a workpiece, and the plate 17 is equipped with a suction surface K for sucking and holding the workpiece, and a mounting surface S contacting with the grinding head main body when mounted on the main body, and the flatness before mounting the surface S is set two times or less than the flatness before mounting the surface K. |
