发明名称 MAGNETIC CIRCUIT FOR SPUTTERING EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To carry out the regulation of size and magnetic field according to the size and material. of a target by screwing, respectively via pedestals, a prism-shaped permanent magnet and a permanent magnet which is provided in its outside periphery and magnetized in the opposite direction. SOLUTION: The magnetic circuit is constituted of a square-plate-shaped yoke 1, prism-shaped permanent magnets 2, 3, pedestals 4, and screws 5. The permanent magnet 2 is fixed on the pedestal 4 in such a way that its yoke 1 side becomes N pole and its opposite side becomes S pole; and the permanent magnet 3 is fixed on the pedestal 4 in such a way that its yoke 1 side becomes S pole and its opposite side becomes N pole. Further, the pedestal 4 on which the permanent magnet 2 is fixed is fixed to the central part of the yoke 1 by means of the screw 5; and the pedestal 4 on which the permanent magnet 3 is fixed is fixed by means of the screw 5 to the outside periphery of the yoke 1. The permanent magnets 2, 3 can be moved by attaching and detaching the screws 5. By constituting the permanent magnets so that they are in a divided form and are screwed, they can be attached and detached according to the size of a target.
申请公布号 JP2001040476(A) 申请公布日期 2001.02.13
申请号 JP19990212361 申请日期 1999.07.27
申请人 TOKIN CORP 发明人 KATAOKA ATSUSHI
分类号 C23C14/35;(IPC1-7):C23C14/35 主分类号 C23C14/35
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