| 摘要 |
A surface layer portion of a silicon substrate is etched by using a mixed solution which contains ammonium hydroxide (NH4OH), hydrogen peroxide (H2O2) and water (H2O) at a weight ratio of 1:(1.3 to 2.65):(275 to 433). The density of the etch pits which have occurred in a surface of the silicon substrate whose surface layer portion was etched by the etching step is measured. The crystal quality, etc. of the silicon substrate are evaluated before a process for manufacturing semiconductor devices using such silicon substrates, in order to avoid a lowering of the yields of the semiconductor devices.
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