| 摘要 |
<p>PROBLEM TO BE SOLVED: To form a lightweight solar cell module having improved shock resistance by providing a photovoltaic element, made of an amorphous semiconductor on the light transmitting surface of a substrate as well as a protection layer on its light receiving surface. SOLUTION: A tin film is formed on a light receiving surface A of a substrate 1 and it is heated and cooled gradually to thermally diffuse a tin in the substrate 1, so that a protective layer 10 is formed. Then, the tin film is removed, an SnO2 film is formed on a light transmitting surface B of the substrate 1, and it is divided into plural regions to form a plurality of first electrodes 11. Furthermore, a p-type layer made of amorphous silicon carbide, an i-type layer made of intrinsic amorphous silicon, and an n-type layer made of n-type amorphous silicon are formed over the entire surface in sequence on the light transmitting surface B, so that a pluraility of photoelectric conversion layers 12 and a plurality of second electrodes 13 are formed, and then a covering layer 3 is entirely formed on the light transmitting surface B to produce a solar cell module. Therefore, a solar cell module superior in shock resistance can be provided, by providing the protection layer on the light receiving surface of the substrate, and reduction in strength of the substrate due to ultraviolet ray can be prevented.</p> |
