发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device whose data transfer speed is increased without reducing yield and reliability and not preventing miniaturization, and a manufacturing method therefore. SOLUTION: A manufacturing method of a semiconductor device in which counterposed semiconductor chips 1, 2 are bonded to each other with a resin composition layer 4 whose main component is a thermosetting resin composition and in which the wirings of the semiconductor chips are electrically connected to each other by bumps. The method includes the steps of: counterposing a first and a second semiconductor chips 1, 2 with the resin composition layer 4 and the bump 3 disposed therebetween; melting the resin composition layer 4 at a temperature below the melting point of the bump 3; melting the bump 3 at a temperature over the melting point of the bump 3 with the gap between the first and second semiconductor chips 1, 2 kept constant; electrically connecting the first and second semiconductor chips 1, 2 each other; and then hardening the resin composition layer 4 at a temperature below the melting point of the bump 3.
申请公布号 JP2001035996(A) 申请公布日期 2001.02.09
申请号 JP19990205975 申请日期 1999.07.21
申请人 MITSUBISHI ELECTRIC CORP 发明人 HATANAKA YASUMICHI;TADA KAZUHIRO;FUJIOKA HIROFUMI
分类号 H01L25/18;H01L21/60;H01L25/065;H01L25/07;(IPC1-7):H01L25/065 主分类号 H01L25/18
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