发明名称 FLOATING DEVICE FOR CASSETTE STAGE
摘要 PROBLEM TO BE SOLVED: To provide a floating device for a cassette stage which can be re-cycled, while corresponding to a cassette of different size. SOLUTION: A floating device 3 comprises floating bodies 5A and 5B to which a cassette support 10 and a cassette clamp 20 are attached, and floating bodies 5C and 5D to which a cassette support 40 and a cassette-presence detecting sensor 50 are attached. Here, the floating bodies 5 are so arranged at a cassette stage 2 as to independently support four corners of the bottom surface of a cassette 4.
申请公布号 JP2001035898(A) 申请公布日期 2001.02.09
申请号 JP19990206348 申请日期 1999.07.21
申请人 MECS CORP 发明人 KIMATA KAZUO;NAKAMORI TAKAO
分类号 H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/677
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