发明名称 MOTOR DEVICE, STAGE EQUIPMENT AND EXPOSURE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a motor device excellent in controllability which can reduce a cost by miniaturization and improvement of efficiency of assembling work. SOLUTION: An armature coil 44 is so wound that both end portions 64a, 64b of a coil winding exist outside the coil. Terminal pins 65a, 65b are collectively formed integrally with the coil 44 interposing a molding member 49, and both of the end portions 64a, 64b are connected with the terminal pins 65a, 65b. On a retaining member 12 on which the coil is mounted, sockets 22 are arranged corresponding to the respective terminal pins. Only by connecting the terminal pins 65a, 65b with the corresponding sockets 22, fixing and electrical connection of the coil is completed in one-shot action. An armature unit is constituted of a large number of the coils 44 and generates thrust excellent in linearlity by electromagnetic mutual action with a magnetic pole unit.
申请公布号 JP2001037201(A) 申请公布日期 2001.02.09
申请号 JP19990205706 申请日期 1999.07.21
申请人 NIKON CORP 发明人 TANAKA KEIICHI
分类号 H01L21/027;G03F7/20;G03F7/22;H02K3/04;H02K41/02;(IPC1-7):H02K41/02 主分类号 H01L21/027
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