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发明名称
Verfahren zur Herstellung einer Halbleiterspeichervorrichtung
摘要
申请公布号
DE4028488(C2)
申请公布日期
2001.02.08
申请号
DE19904028488
申请日期
1990.09.07
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI
发明人
OKABE, NAOKO;INOUE, SATOSHI;SUNOUCHI, KAZUMASA;YAMADA, TAKASHI;NITAYAMA, AKIHIRO;TAKATO, HIROSHI
分类号
H01L27/04;H01L21/28;H01L21/822;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01L21/824
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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