OPTO-MECHANICAL VALVE AND VALVE ARRAY FOR FIBER-OPTIC COMMUNICATION

摘要

A microelectromechanical system optical switch is introduced which includes a mirror (1) constructed on a substrate (3). The mirror (1) is movable parallel to the surface of the substrate and either allows an input ray incident at an oblique angle, preferably 45 DEG , to the mirror surface (1) to pass undisturbed through a transparent part of a substrate or reflects the ray to an alternate output.