Isolated multilevel fabricating facility with two way clean tunnel transport system with each tool having adjacent support skid

摘要

An ultra-clean environment for fabrication of semiconductor devices which includes an air transmissive conveyor for conveying semiconductor wafers thereon and a plurality of robotic elements. A clean channel encloses the conveyor. The clean channel includes a filtered air intake extending from one surface of the conveyor and an air exhaust region extending in a direction opposite the air intake. The robotic elements is disposed external to and communicating with the clean channel. Laminar flow of filtered air is provided from the air intake to the air exhaust. The conveyor preferably traverses a serpentine path. The path of the conveyor is substantially bi-directional in that it travels in a first direction in then in the opposite direction immediately adjacent the portion traveling in the first direction. Robotic elements are disposed external to the clean channel, communicate with the clean channel and are at a reduced pressure relative to the clean channel. A plurality of said conveyors can be disposed within the clean channel, preferably stacked one floor atop the other. Each tool has its support skid immediately adjacent to the tool it serves.